Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The anisotropic susceptibility Δχ of SbCl5-graphite intercalation compounds (GIC) has been studied for stages 2, 3, 4 and 5 in the temperature range from 4.2 K to 300 K. The orbital susceptibility χorb, | (H | c-axis) is diamagnetic for stages, 2, 3, 4 and 5. χorb, | increases slightly up to the stage 4 and then decreases considerably at the stage 5. Anomaly of Δχ with a temperature hysteresis has been observed in the temperature range from 225 K to 260 K. The magnitude of its anomaly increases with increasing the stage number. This result suggests the existence of the hybridization of carbon and intercalant molecule orbitals. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Mark W. Dowley
Solid State Communications
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures