Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Let G = (V, E) be any d-regular graph with girth g on n vertices, for d ≥ 3. This note shows that G has a maximum matching which includes all but an exponentially small fraction of the vertices, O((d - 1)-g/2). Specifically, in a maximum matching of G, the number of unmatched vertices is at most n/n0(d, g), where n0(d, g) is the number of vertices in a ball of radius [(g - 1)/2] around a vertex, for odd values of g, and around an edge, for even values of g. This result is tight if n < 2n 0(d, g).
J. LaRue, C. Ting
Proceedings of SPIE 1989
T. Graham, A. Afzali, et al.
Microlithography 2000
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997