Joachim N. Burghartz, Michael Hargrove, et al.
IEEE Transactions on Electron Devices
Paper
Measurement of VLSI Power Supply Current by Electron-Beam Probing
Abstract
The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. © 1992 IEEE
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