Microlithographic applications of silicon-containing polymers and individual organosilicon compounds

Conference paper

01 Mar 1998

Paper

E. Babich, J. Paraszczak, et al.

Microelectronic Engineering

Conference paper

J. Paraszczak, D. Edelstein, et al.

IEDM 1993

Conference paper

J. Paraszczak, E. Babich, et al.

Proceedings of SPIE 1989

Conference paper

J. Paraszczak, J.M. Shaw, et al.

Microlithography 1983

Related