Microlithographic applications of silicon-containing polymers and individual organosilicon compounds

N.J. Chou, J. Parazsczak, et al.

Microelectronic Engineering

E. Babich, J.M. Shaw, et al.

Microelectronic Engineering

J.M. Shaw, M. Hatzakis, et al.

Polymer Engineering & Science

J. Paraszczak, D. Edelstein, et al.

IEDM 1993