Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Simulations on the vibrational density of states of very large percolation clusters are presented. Above threshold (p>pc), not only does one find no accumulation of modes around the phonon-fracton crossover, but the number of modes is also depressed throughout the fracton region. These missing modes accumulate near the upper frequency cutoff. The reason for this pileup is explained, and scaling considerations account for the dependence on p-pc of the size of this effect. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
J.H. Stathis, R. Bolam, et al.
INFOS 2005