Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We illustrate the failure of standard algorithms to predict correctly the dimension of some composite maps that produce on-off intermittency. Examination of the phase portraits of some examples suggests that the culprit is a nearly singular density of points close to the origin and we describe ways to refine the algorithms so as to obtain correct results. © 1996 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Journal of Applied Mechanics, Transactions ASME
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EMC 2001
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