E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990