Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
CdS films prepared by chemical spray pyrolysis (CSP) can display a variety of morphologies from tenths of microns to hundreds of microns in size. In this work, we analyze the source and composition of these features as well as the composition of the CdS film. As these features can affect the operation efficiency of solar cells using this material, it is important to understand their nature and means for controlling or eliminating them. © 1995.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering