David B. Mitzi
Journal of Materials Chemistry
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
David B. Mitzi
Journal of Materials Chemistry
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008