Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A new type of spatially controlled model catalyst was prepared by electron beam lithography. The catalyst consisted of a square array of disc shaped platinum particles 50 nm in diameter and spaced at 200 nm on an oxidized silicon wafer. The catalyst was cleaned of surface contaminants by low energy neon ion sputtering without adversely altering the characteristics of the array. Catalytic activity was confirmed by performing ethylene hydrogenation at high pressure. Evidence of deuterium spillover was seen by thermal desorption experiments.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology