J.H. Stathis, R. Bolam, et al.
INFOS 2005
Novel low temperature epitaxial growth techniques such as molecular beam epitaxy and low temperature chemical vapor deposition permit the use of pseudomorphic Si1-xGex alloys in silicon technology. The smaller band gap of these alloys allows for a variety of novel band-engineered structures that promise to enhance silicon-based technology significantly. In this brief review, we discuss the growth and properties of pseudomorphic Si1-xGex structures ands then focus on their applications, especially the Si1-xGex base heterojunction bipolar transistor. © 1990.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989