Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Novel low temperature epitaxial growth techniques such as molecular beam epitaxy and low temperature chemical vapor deposition permit the use of pseudomorphic Si1-xGex alloys in silicon technology. The smaller band gap of these alloys allows for a variety of novel band-engineered structures that promise to enhance silicon-based technology significantly. In this brief review, we discuss the growth and properties of pseudomorphic Si1-xGex structures ands then focus on their applications, especially the Si1-xGex base heterojunction bipolar transistor. © 1990.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
E. Burstein
Ferroelectrics
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Revanth Kodoru, Atanu Saha, et al.
arXiv