Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Numerical simulations for an XY-spin-glass model are presented. The connection to recent experiments on high-Tc superconductors is outlined. In particular, the glass behaviour in experiments is reproduced by a 2-D model. A phase diagram important for future experiments is also provided. A substantial gain in Tc is predicted for enhanced couplings between planes. © 1987 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
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Digital Discovery
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering