Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We further develop the 0/1 ILP formulation of Lee for edge coloring where colors are encoded in binary. With respect to that formulation, our main contributions are (i) an efficient separation algorithm for general block inequalities, (ii) an efficient LP-based separation algorithm for stars (i.e., the all-different polytope), (iii) an introduction of matching inequalities, (iv) an introduction of switched path inequalities and their efficient separation, (v) a complete description for paths, and (vi) the promising computational results. © 2007 INFORMS.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elliot Linzer, M. Vetterli
Computing
Bowen Zhou, Bing Xiang, et al.
SSST 2008
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007