Conference paper
EPI active devices
G.L. Patton, B.S. Meyerson, et al.
Silicon Materials Science and Technology 1990
No abstract available.
G.L. Patton, B.S. Meyerson, et al.
Silicon Materials Science and Technology 1990
P.J. Wang, M.S. Goorsky, et al.
Applied Physics Letters
F.K. LeGoues, M. Hammar, et al.
Surface Science
J.W. Bartha, P.O. Hahrt, et al.
JVSTA