Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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Bi2Pt2O7 with a pyrochlore structure was formed in an air atmosphere. Its powder diffraction data are presented. © 1991.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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INFORMS 2021
Eloisa Bentivegna
Big Data 2022
T.N. Morgan
Semiconductor Science and Technology