Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We give a numerical criterion for a badly conditioned zero of a system of analytic equations to be part of a cluster of two zeros.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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Proceedings of SPIE 1989
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SPIE Advances in Semiconductors and Superconductors 1990
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SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991