Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
No abstract available.
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
T. Graham, A. Afzali, et al.
Microlithography 2000
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009