Roger Kelly, Antonio Miotello
Surface and Coatings Technology
The sputtering of polymer films with 248 or 308 nm laser pulses causes two groups of particles to be emitted. Light particles are emitted more rapidly and escape to form a shock wave. Heavy particles are emitted more slowly and under some conditions are impeded by the light ones, expand sideways, and leave debris on the target surface. Debris formation can be understood from ordinary gas dynamics where it is equivalent to recondensation beyond the bombarded spot. This is shown by numerical solution of the flow equations.
Roger Kelly, Antonio Miotello
Surface and Coatings Technology
M.T. Shehata, Roger Kelly, et al.
JES
Bodil Braren, Kelly G. Casey, et al.
Nuclear Inst. and Methods in Physics Research, B
Steven Dzioba, Roger Kelly
Surface Science