Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Paper
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
Abstract
No abstract available.
Related
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Ronald Troutman
Synthetic Metals
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992