Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements