Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The exciton ground state in silicon is calculated taking into accoun the effect of the split-off valence band. We show that this effect is very important. The anisotropy splitting of the ground state is found to be 0.32 meV, while a previous analysis, which neglected the split-off band, gave 0.46 meV. The new result is in good agreement with recent experimental data. © 1979.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Michiel Sprik
Journal of Physics Condensed Matter