Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
The solution of a set of linear equations involving a circulant matrix is easily accomplished with an algorithm based on fast Fourier transforms. The numerical stability of this algorithm is studied. It is shown that the algorithm is weakly stable; i.e., if the circulant matrix is well conditioned, then the computed solution is close to the exact solution. On the other hand, it is shown that the algorithm is not strongly stable - the computed solution is not necessarily the solution of a nearby circular deconvolution problem.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
M. Tismenetsky
International Journal of Computer Mathematics
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009