William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics