R.W. Dreyfus, R.E. Walkup, et al.
Topical Meeting on Lasers in Materials Diagnostics 1986
Paper
Optical diagnostics of low pressure plasmas
Abstract
The techniques of optical emission spectroscopy with actinome-try, laser induced fluorescence spectroscopy, laser optogalvanic spectroscopy and absorption spectroscopy are discussed. Examples of the application of these techniques to probing low pressure plasmas of the type used in microelectronics materials processing are presented. © 1985 IUPAC
Related
R.W. Dreyfus, S.C. Wallace
Optics Communications
J.O. Chu, D.B. Beach, et al.
Chemical Physics Letters
R.E. Walkup, Ph. Avouris, et al.
MRS Symposium 1983