Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A brief review of selected band structure calculations pertinent to III-V compounds and alloys is given and a simplified representation of alloy band structures is developed. Then measurement techniques and selected examples of these measurements are given for various types of band structure. Absorption, luminescence, and modulated reflectance measurements are discussed for the direct band gap; absorption, modulated absorption, luminescence measurements for the indirect gap; and modulated absorption measurements for subsidiary conduction bands. © 1973.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
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MRS Proceedings 1983