PaperHigh-temperature SiO2 decomposition at the SiO2/Si interfaceR.M. Tromp, G.W. Rubloff, et al.Physical Review Letters
PaperSummary Abstract: High temperature decomposition of SiO2at the Si/SiO2 interfaceG.W. Rubloff, R.M. Tromp, et al.JVSTA