William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
David B. Mitzi
Journal of Materials Chemistry
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering