Marí P. Bernal, Geoffrey W. Burr, et al.
Applied Optics
The cycling endurance of phase-change memory is one of the last hurdles to overcome to enable its adoption in the larger market for persistent memory products. Phase-change memory cycling endurance failures, whether they are stuck-SET (caused by elemental segregation) or stuck-RESET (caused by void formation), are caused by atomic migration. Various driving forces responsible for the atomic migration have been identified, such as hole-wind force, electrostatic force, and crystallization-induced segregation. We introduce several strategies to improve cycling endurance based on an understanding of driving forces and interactions among them. Utilizing some of these endurance-improving techniques, record-high phase-change memory cycling endurance at around 1012 cycles has been recently reported using a confined phase-change memory cell with a metallic liner.
Marí P. Bernal, Geoffrey W. Burr, et al.
Applied Optics
Jaeho Lee, Sangbum Kim, et al.
IEEE Electron Device Letters
Geoffrey W. Burr, Matthew J. Breitwisch, et al.
Journal of Vacuum Science and Technology B
Jaione Tirapu Azpiroz, Geoffrey W. Burr, et al.
SPIE Advanced Lithography 2008