Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The phase transformation, coalescence, and twin structure of thermally annealed 6 nm FePt nanocrystals under high vacuum on an amorphous carbon surface have been investigated. A1-FePt phase to L10-FePt phase transformation occurs at 530°C. The multilayered nanocrystal assemblies coalesce to form larger grains at 600°C. These coalesced nanocrystals do not form a single grained structure; instead, twinning becomes a characteristic structure feature. The surface of the coalescent grains consists of {111} and (001) facets.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures