Photochemical generation and deposition of copper from a gas phase precursor

C.R. Jones; F.A. Houle; C.A. Kovac; T.H. Baum

doi:10.1063/1.95811

Applied Physics Letters

Paper

01 Jan 1985

Photochemical generation and deposition of copper from a gas phase precursor

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Abstract

The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.

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