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Journal of Physics and Chemistry of Solids
No abstract available.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008