Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Light incident on a total internal reflection surface will tunnel through a submicrometre gap in the presence of a dielectric surface. This tunnelling phenomenon is used in the photon tunnelling microscope to image polyethylene single crystals, providing a topographical map of the single-crystal surface. Tunnelling increases exponentially with sample height and is quantified using video photometry of the grey-scale tunnelling image. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kigook Song, Robert D. Miller, et al.
Macromolecules
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP