Physical and chemical mechanisms in the ion-enhanced etching of silicon

Paper

01 Jan 1984

Abstract

No abstract available.

Paper

C.M. Brown, L. Cristofolini, et al.

Chemistry of Materials

Conference paper

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Review

David B. Mitzi

Journal of Materials Chemistry

Paper

J.A. Barker, D. Henderson, et al.

Molecular Physics