Conference paper
Contrast enhanced UV lithography with polysilanes
Donald C. Hofer, Robert D. Miller, et al.
Microlithography 1984
No abstract available.
Donald C. Hofer, Robert D. Miller, et al.
Microlithography 1984
Jeong-Ik Lee, Victor Y. Lee, et al.
ETRI Journal
Q.R. Huang, Curtis W. Frank, et al.
Chemistry of Materials
Eva Harth, Brooke Van Horn, et al.
ACS National Meeting 2002