Conference paper
Electron beam microcolumn for multi-beam applications
E. Kratschmer, H.S. Kim, et al.
IVMC 1995
Normalized ionization probabilities α+ are reported for binary Fe-Ni alloys under O+2 bombardment at a 45° incidence angle. It is shown that the dependence of α+ on the composition is much smaller than at normal incidence. Photoemission spectroscopy reveals that both nickel and iron remain essentially metallic under oblique-incidence bombardment, whereas almost complete oxidation occurs at normal incidence. This is attributed to our observation that sputter yields under oxygen bombardment increase much faster than cos α-1.
E. Kratschmer, H.S. Kim, et al.
IVMC 1995
T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
A. Närmann, M.L. Yu
Surface Science
M.B. Small, R. Ghez, et al.
JES