E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We report the controlled synthesis of micrometre-sized thermally labile PMMA particles. This was achieved by a combination of dispersion polymerization and chain transfer techniques. The dispersion polymerization allows for the synthesis of spherical micrometre-size particles of PMMA, whereas the use of cobalt chain transfer agents results in vinylidene end-functionalized PMMA. Furthermore, the vinylic end-groups facilitate thermal depolymerization and this consequently limits the thermal stability. We anticipate that these PMMA particles could further serve as useful modifiers to generate porous polymers, including siloxane elastomers. © 1997 Elsevier Science Ltd. All rights reserved.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
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