Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report the controlled synthesis of micrometre-sized thermally labile PMMA particles. This was achieved by a combination of dispersion polymerization and chain transfer techniques. The dispersion polymerization allows for the synthesis of spherical micrometre-size particles of PMMA, whereas the use of cobalt chain transfer agents results in vinylidene end-functionalized PMMA. Furthermore, the vinylic end-groups facilitate thermal depolymerization and this consequently limits the thermal stability. We anticipate that these PMMA particles could further serve as useful modifiers to generate porous polymers, including siloxane elastomers. © 1997 Elsevier Science Ltd. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
P.C. Pattnaik, D.M. Newns
Physical Review B
Peter J. Price
Surface Science