William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
The present status of ellipsometric measurement capability is reviewed. Significant advances since the last ellipsometry conference are highlighted. © 1980.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A. Reisman, M. Berkenblit, et al.
JES
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films