Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
The purpose of this paper is two-fold: first to show how a natural mathematical formulation of the "solution" of a system of recursion equations is formally almost identical with well-known formulations of a solution of a system of "iteration equations." The second aim is to present a construction which takes an algebraic theory T and yields another algebraic theory M(T) whose morphisms correspond to systems of recursion equations over T. This construction is highly uniform, i.e., the correspondence between T and M(T) is functorial. © 1983.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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ICLR 2026
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