Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A recursive stochastic integral equation for the detection of counting processes is derived from a previously known formula [5] of the likelihood ratio. This is done quite simply by using a result due to Doléans-Dade [4] on the solution of stochastic integral equations. © 1976 Springer-Verlag New York Inc.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Heng Cao, Haifeng Xi, et al.
WSC 2003
Y.Y. Li, K.S. Leung, et al.
J Combin Optim