M. Hargrove, S.W. Crowder, et al.
IEDM 1998
No abstract available.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth