S. Zafar, M. Yang, et al.
VLSI Technology 2005
The anomalous properties of defect centers observed by Warren and Lenahan (ref. 1), in certain plasma enhanced chemical vapor deposited silica films must be examined in a broader light. The presence of a compensating impurity is indicated.(AIP).
S. Zafar, M. Yang, et al.
VLSI Technology 2005
J.H. Stathis, D.A. Buchanan, et al.
Applied Physics Letters
D.J. Dimaria, M.V. Fischetti, et al.
Physical Review Letters
D.J. DiMaria, J.H. Stathis
Applied Physics Letters