J.H. Stathis, S. Rigo, et al.
Solid State Communications
The anomalous properties of defect centers observed by Warren and Lenahan (ref. 1), in certain plasma enhanced chemical vapor deposited silica films must be examined in a broader light. The presence of a compensating impurity is indicated.(AIP).
J.H. Stathis, S. Rigo, et al.
Solid State Communications
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