A. Gangulee, F.M. D'Heurle
Thin Solid Films
No abstract available.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures