Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Preemptive open shop scheduling can be viewed as an edge coloring problem in a bipartite multigraph. In some applications, restrictions of colors (in particular preassignments) are made for some edges. We give characterizations of graphs where some special preassignments can be embedded in a minimum coloring (number of colors = maximum degree). The case of restricted colorings of trees is shown to be solvable in polynomial time.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003