Conference paper
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
No abstract available.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
D.D. Tang, Alwin E. Michel
IEEE T-ED
Gerald Burns, Marshall I. Nathan
Journal of Applied Physics
Gerald Burns, E.A. Geiss, et al.
Physical Review