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Presented here is an overview of the present status and future prospects of scanning tunneling microscopy. Topics covered include the physical basis of the scanning tunneling microscope, its instrumentation aspects, and its use for structural and spectroscopic imagingon a scale which extends to atomic dimensions. Associated experimental and theoretical studies are reviewed, including several which suggest potential applicability of this new type of microscope to a relatively broad range of biological, chemical, and technological areas. © 2000 IBM.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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