H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Paper
Secondary defect formation in bonded silicon-on-insulator after boron implantation
Abstract
No abstract available.
Related
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001