Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Poly(4,4′-oxydiphenylene biphenyltetracarboxamic acid) was synthesized in N-methyl pyrrolidone from biphenyltetracarboxylic dianhydride and 4,4′-oxydiphenylene diamine, and then converted to the polyimide in films by thermal imidization at 400 °C. The polyimide exhibits an exceptionally good self-adhesion (814-1187 J/m2) and also good adhesions (>687 J/m2) to inorganic substrates such as silicon wafer and glass ceramic. An oxygen plasma treatment enhances the self-adhesion highly, whereas a silane primer treatment improves the adhesions to the substrates. In addition, the morphological structure and some other properties were investigated.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Peter J. Price
Surface Science