Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The theory of slow, steady-state viscoelastic flow is applied to axisymmetric motions in which the region of flow is so far from the axis of symmetry that the motion is “almost plane." Corrections for slight azimuthal curvature are explicitly calculated. The Reiner-Rivlin fluid is discussed as an illustrative special case. © 1972 by ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Zeitschrift fur Kristallographie - New Crystal Structures
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Technical Digest-International Electron Devices Meeting
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Surface Review and Letters