Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper describes some structural and magnetic observations on evaporated films of 75 Co 25 Ni. The magnetic properties vary with substrate temperature and film thickness and different hysteresis loops were observed on the two surfaces of the films. The structural observations showed that a (111) fibre structure occurred at the film/air surface for some deposition conditions. A two-layer model is proposed to correlate the magnetic and structural observations. © 1970.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Eloisa Bentivegna
Big Data 2022