Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
No abstract available.
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
T. Graham, A. Afzali, et al.
Microlithography 2000
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994